Specialty Gases
Fluoride Gases
| Name | CAS | Formula | MW |
|---|---|---|---|
| Nitrogen trifluoride | 7783-54-2 | NF3 | 71.002 |
| Tungsten hexafluoride | 7783-82-6 | WF6 | 297.83 |
| Tetrafluoromethane | 75-73-0 | CF4 | 88.004 |
| Sulfur hexafluoride | 2551-62-4 | SF6 | 146.055 |
Alkane Gases
| Name | CAS | Formula | MW |
|---|---|---|---|
| Arsine | 7784-42-1 | AsH3 | 77.945 |
| Phosphine | 7803-51-2 | PH3 | 33.998 |
| Diborane | 19287-45-7 | B2H6 | 27.67 |